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A METHOD OF MANUFACTURING A GRAYTONE MASK, THE GRAYTONE MASK AND A GRAYTONE MASK BLANK
A METHOD OF MANUFACTURING A GRAYTONE MASK, THE GRAYTONE MASK AND A GRAYTONE MASK BLANK
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机译：一种制造灰色面膜，灰色面膜和灰色面膜毛坯的方法
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摘要
PURPOSE: A method for manufacturing a gray tone mask and a gray tone mask blank are provided to suppress the progress of a side etching operation to a cross-section exposed light shielding film in case of etching a semi-transmitting film. CONSTITUTION: A gray tone mask includes patterns composed of a light shielding part, a transmitting part, and a semi-transmitting part. The gray tone mask includes light shielding film patterns(22a) and semi-transmitting film patterns(24a) on a transparent substrate. The patterns are formed by respectively etching a light shielding film(22) and a semi-transmitting film(24). The light shielding part is based on at least the light shielding film. The semi-transmitting part is based on the semi-transmitting film on the transparent substrate. The transmittance change of the semi-transmitting film in the exposing wavelength region from i line to g line is less than or equal to 1.5%.
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