MEMS device having electrothermal actuation and release and method for fabricating

• 1. 具有压电致动的MEMS设备、投射MEMS系统以及相关驱动方法 [P] . 中国专利： CN108249382A . 2018-07-06
• 2. 具有压电致动的微流体MEMS器件及其制造工艺 [P] . 中国专利： CN109278407B . 2021.06.25
• 3. MEMS device having electrothermal actuation and release and method for fabricating [P] . 美国专利： US2004012298A1 . 2004-01-22

  机译： 具有电热致动和释放的MEMS装置及其制造方法

• 4. MEMS DEVICE HAVING ELECTROTHERMAL ACTUATION AND RELEASE AND METHOD FOR FABRICATING [P] . 世界知识产权组织专利： WO03043042A1 . 2003-05-22

  机译： 具有电热致动和释放的微机电系统器件及其制造方法

• 5. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same [P] . 美国专利： US6825967B1 . 2004-11-30

  机译： 用于微电子机械系统（MEMS）器件以改善执行器性能的成形电极及其制造方法

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