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首页> 外文会议>IEEE International Conference on Nano/Micro Engineered and Molecular Systems >Design of a novel electrothermal actuator for integrated MEMS safety-and-arming devices
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Design of a novel electrothermal actuator for integrated MEMS safety-and-arming devices

机译：用于集成MEMS安全与装甲设备的新型电热执行器的设计

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摘要

The design, fabrication and characterization of a novel electrothermal actuator for MEMS safety-and-arming devices are presented in this paper. The device is comprised of two V-shape electrothermal actuators, a V-beam amplification and a mechanical slider. The two V-shape electrothermal actuators generate the original displacement and the V-beam amplification is used to amplify this displacement for arming. The characteristics of the V-shape actuator and V-beam amplification are analyzed and validated by finite element method. The whole device is fabricated on SOI wafer, and MUMPs process is introduced. The experiment results demonstrate that the displacement of the device is 120.89 μm with consuming power of 3.12 W and response time of 16 ms under an applied voltage of 16 V. The chip size is about 4mm*5mm*0.5mm, which can be easily integrated with other micro devices.
机译：本文介绍了一种用于MEMS安全与武装设备的新型电热执行器的设计，制造和特性。该设备由两个V形电热执行器，一个V形光束放大和一个机械滑块组成。两个V形电热执行器产生原始位移，并使用V光束放大来放大此位移以进行布防。通过有限元方法分析和验证了V形作动器的特性和V形梁的放大。整个器件在SOI晶圆上制造，并介绍了MUMP工艺。实验结果表明，该器件的位移为120.89μm，在施加16 V电压时的功耗为3.12 W，响应时间为16 ms。芯片尺寸约为4mm * 5mm * 0.5mm，可以轻松集成与其他微型设备。

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