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首页> 外文期刊>Microsystem technologies >Design of a large displacement thermal actuator with a cascaded V-beam amplification for MEMS safety-and-arming devices
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Design of a large displacement thermal actuator with a cascaded V-beam amplification for MEMS safety-and-arming devices

机译：具有级联V型光束放大功能的大位移热执行器的设计，用于MEMS安全与武装设备

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摘要

The design, fabrication and characterization of a large displacement thermal actuator with a cascaded V-beam amplification for MEMS safety-and-arming (SA) devices are presented. The device is comprised of two V-shape electrothermal actuators, a cascaded V-beam amplification and two mechanical sliders. Compared with conventional lever amplifications, the vertical anti-acceleration stiffness of V-beam amplifications is much larger, which can meet the need of high-acceleration weapons. The special design of two symmetric mechanical sliders can double the displacement to ensure the MEMS SA device in armed state. The whole device is fabricated on a SOI wafer and fabrication process is introduced. Under an applied voltage of 15 V, the displacement of the device is 231.78 mu m with consuming power of 5.10 W and response time of 16 ms. The chip size of the actuator is about 4 mm x 5 mm x 0.5 mm. The proposed actuator possesses outstanding performance in miniaturization, low cost and easy integration with other parts of MEMS SA devices.
机译：提出了具有级联V形光束放大功能的大位移热执行器的设计，制造和特性，用于MEMS安全与布防（SA）设备。该设备由两个V形电热执行器，一个级联的V光束放大和两个机械滑块组成。与传统的杠杆放大器相比，V形波束放大器的垂直抗加速刚度要大得多，可以满足高加速度武器的需求。两个对称机械滑块的特殊设计可使位移增加一倍，以确保MEMS SA设备处于待命状态。整个器件在SOI晶圆上制造，并介绍了制造工艺。在15 V的施加电压下，该器件的位移为231.78μm，消耗功率为5.10 W，响应时间为16 ms。执行器的芯片尺寸约为4毫米x 5毫米x 0.5毫米。所提出的致动器在小型化，低成本和易于与MEMS SA器件的其他部分集成方面具有出色的性能。

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