首页> 外国专利> METHOD AND APPARATUS TO FABRICATE POLYMER ARRAYS ON PATTERNED WAFERS USING ELECTROCHEMICAL SYNTHESIS

METHOD AND APPARATUS TO FABRICATE POLYMER ARRAYS ON PATTERNED WAFERS USING ELECTROCHEMICAL SYNTHESIS

机译:电化学合成在图案化晶片上形成聚合物阵列的方法和装置

摘要

A wafer having a plurality of dies (also called array chips) on the wafer, the die having an electrode to generate a deprotecting reagent, a working electrode to electrochemically synthesize a material, a confinement electrode adjacent to the working electrode to confine reactive reagents, and a die pad, wherein die pads of the plurality of dies are interconnected on the wafer to electrochemically synthesize the material in parallel on a plurality of working electrodes is disclosed. Also, a method for wafer-scale manufacturing of a plurality of dies and a method for electrochemically synthesizing a material in parallel on a plurality of dies on a wafer are disclosed.
机译:一种在晶片上具有多个管芯(也称为阵列芯片)的晶片,该管芯具有用于产生脱保护剂的电极,用于电化学合成材料的工作电极,与该工作电极相邻的用于限制反应性试剂的限制电极,本发明还公开了一种管芯焊盘,其中,多个管芯的管芯焊盘在晶片上互连,以在多个工作电极上以电化学方式并行地合成材料。另外,公开了用于晶片级制造多个管芯的方法和用于电化学合成在晶片上的多个管芯上并行地材料的方法。

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