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Semiconductor failure analysis equipment, failure analysis method, failure analysis program, and failure analysis system
Semiconductor failure analysis equipment, failure analysis method, failure analysis program, and failure analysis system
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机译:半导体故障分析设备,故障分析方法,故障分析程序和故障分析系统
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摘要
PROBLEM TO BE SOLVED: To provide a semiconductor failure analysis apparatus, analysis method, analysis program, and analysis system allowing the failure analysis of a semiconductor device surely and efficiently.;SOLUTION: The failure analysis apparatus 10 comprises an inspection information acquisition section 11 for acquiring at least a pattern image P1 of the semiconductor device, a layout information acquisition section 12 for acquiring a layout image P3, a failure analysis section 13 for the analysis of a failure of the semiconductor device, and an analysis screen display control section 14 for allowing a display device 40 to display information on the failure analysis. The analysis screen display control section 14 generates a superimposed image that is the superimposition of the pattern image P1 and the layout image P3 on each other as an image of the semiconductor device to be displayed by the display device 40 and sets the transmissivity of the layout image P3 with respect to the pattern image P1 in the superimposed image.;COPYRIGHT: (C)2007,JPO&INPIT
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