FABRICATION METHOD OF NANO-SCALE STRUCTURES ON SiC USING AFM LOCAL OXIDATION

• 1. 一种多尺度结构 SiC/C 多孔复合陶瓷及其制备方法 [P] . 中国专利： CN104817337B . 2017.08.29
• 2. 一种多尺度结构SiC/C多孔复合陶瓷及其制备方法 [P] . 中国专利： CN104817337A . 2015-08-05
• 3. LARGE AREA FABRICATION METHOD BASED ON THE LOCAL OXIDATION OF SILICON AND/OR DIFFERENT MATERIALS ON MICRO- AND NANO-SCALE [P] . 世界知识产权组织专利： WO2005040037A1 . 2005-05-06

  机译： 基于硅和/或不同材料在微尺度和纳米尺度上局部氧化的大面积制造方法

• 4. Method of forming nano-scale structures on silicon-carbide by local oxidation [P] . 韩国专利： KR102085604B1 . 2020-03-09

  机译： 通过局部氧化在碳化硅上形成纳米级结构的方法

• 5. Method of forming nano-scale structures on silicon-carbide by local oxidation [P] . 韩国专利： KR20190058741A . 2019-05-30

  机译： 通过局部氧化在碳化硅上形成纳米级结构的方法

• 1. Fabrication of Periodic Nanostructures Using AFM Tip-Based Nanomachining:Combining Groove and Material Pile-Up Topographies [J] . Yanquan Geng, Yongda Yan, Jiqiang Wang, 工程（英文） . 2018,第006期
• 2. Fabrication of Periodic Nanostructures Using AFM Tip-Based Nanomachining: Combining Groove and Material Pile-Up Topographies [J] . Yanquan Geng, Yongda Yan, Jiqiang wang, 工程（英文） . 2018,第006期
• 3. Fabrication of 3D structure by combining AFM and chemical etching on crystalline silicon surface [J] . 哈尔滨工业大学学报（英文版） . 2006,第006期
• 4. Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation [J] . Wang Xuewen, Theogene Barayavuga, Mei Huanhuan, Ferroelectrics . 2019,第1期
• 5. 3-D finite element calculation of electric field enhancement for nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation [J] . Theogene Barayavuga, Cui Jianlei, Wang Xuewen, Integrated Ferroelectrics . 2018,第期
• 6. 3-D finite element calculation of electric field enhancement for nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation [J] . Theogene Barayavuga, Cui Jianlei, Wang Xuewen, Integrated Ferroelectrics . 2018,第期
• 7. Nano-scale Sample-plate Fabrication by AFM-tip Induced Local Oxidation [C] . Jing Weixuan, Jiang Zhuangde Precision Mechanical Measurement: (Preliminary Program of ISIST'2002) Vol.4 . 2002
• 8. Connecting cell structure to local mechanical properties by combining multi-harmonic AFM methods with fluorescence microscopy. [D] . Yamin, Leyla. 2012
• 9. Nano-structure fabrication of GaAs using AFM tip-induced local oxidation method: different doping types and plane orientations [O] . Jung-Joon Ahn, Kyoung-Sook Moon, Sang-Mo Koo 2011
• 10. Nano-structure fabrication of GaAs using AFM tip-induced local oxidation method: different doping types and plane orientations [O] . Jung-Joon Ahn, Kyoung-Sook Moon, Sang-Mo Koo 2011
• 11. FABRICATION AND PROPERTI ES OF SILICON COMPOUNDS TASKⅠ. FABRICATION, MICROSTRUCTURE AND SELECTED PROPERTIES OF SIAlON COMPOSITIONS TASKⅡ. OXIDATION OF SiC HOT-PRESSED WITH A1203 [R] . F. F. Lange, S.C. Singhal, F. P. Lange 1974

• 1. Research of Current Mode Atomic Force Microscopy (C-AFM) for Si/SiC Heterostructures on 6H-SiC(0001) [J] . Song Feng ,Lixun Song ,Yuan Zang . 北京理工大学学报：英文版 . 2020,第2期
• 2. The Microstructure and Oxidation Resistance of The Microstructure and Oxidation Resistance of Slurry Method on Rene 80 Superalloy [J] . Marek Goral . 矿物质和材料特性和工程（英文） . 2012,第7期
• 3. 直接金属氧化法制备SiC<,p>/Al<,2>O<,3>-Al复合材料的显微结构及工艺因素的研究 [C] . 王芬 ,林营 ,罗宏杰 . 中国硅酸盐学会陶瓷分会2003年学术年会 . 2003
• 4. 阳极氧化法制备4H-SiC纳米阵列与结构调控及其光电特性 [A] . 陈春梅 . 2016