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FABRICATION METHOD OF CROSS TYPE PHASE CHANGE DEVICE USING 3-DIMENSIONAL IMPRINT AND LIFT OFF PROCESS AND THE CROSS TYPE PHASE CHANGE DEVICE MANUFACTURED BY THE METHOD
FABRICATION METHOD OF CROSS TYPE PHASE CHANGE DEVICE USING 3-DIMENSIONAL IMPRINT AND LIFT OFF PROCESS AND THE CROSS TYPE PHASE CHANGE DEVICE MANUFACTURED BY THE METHOD
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机译:利用三维印后升降过程的交叉相变装置的制造方法及由该方法制造的交叉相变装置
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摘要
PURPOSE: A 3D imprint, a manufacturing method thereof, and a cross type phase change device thereof are provided to align a cross type phase change device by executing an imprint process using a stamp and executing a series patterning process for the manufacture of a device. CONSTITUTION: A resist is spread on a substrate including a first insulating body, a first conductive body for a lower electrode, and a second insulating body(S110). An edge, where the resist is removed by using the resist as a mask, is etched(S120). A resist in a center part is removed by using a reactive ion etching process. The second insulating body, which is exposed by the reactive ion etching process, is etched(S190).
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