首页>
外国专利>
The stray magnetic field measurement method in electron beam apparatus and electron beam apparatus
The stray magnetic field measurement method in electron beam apparatus and electron beam apparatus
展开▼
机译：电子束装置中的杂散磁场测量方法及电子束装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To solve such a problem that a stray magnetic field existing on an electron optical system is one of direct causes that deteriorate an image during observation or the like of a high-resolution image in an electron microscope, therefore, it is required to take the countermeasure against the stray magnetic field by evaluating a level of effects of the stray magnetic field, however, in a conventional method for evaluating and observing spots of electron beams, both the sensitivity and accuracy are not sufficient, and moreover, measurement is executed on the optical conditions different from those of an image observation optical system, accordingly, it is likely that the measurement result prevents image observation conditions from being correctly evaluated.;SOLUTION: For example, in the high-resolution image observation optical system, a lattice image is observed by changing the sample position on the optical axis of the electron optical system so as to quantitatively evaluate the stray magnetic field, affecting the image-formation, based on the relationship between the contrast of the lattice image and the sample position then obtained.;COPYRIGHT: (C)2010,JPO&INPIT
展开▼
