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The stray magnetic field measurement method of the electron beam apparatus using the electron beam apparatus and the electron biprism using an electron biprism
The stray magnetic field measurement method of the electron beam apparatus using the electron beam apparatus and the electron biprism using an electron biprism
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机译：使用电子束装置的电子束装置和使用电子双棱镜的电子双棱镜的杂散磁场测量方法
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摘要
PROBLEM TO BE SOLVED: To provide a method for evaluating the effect of a floating magnetic field existing on an electron optical system to take a countermeasure thereto, the floating magnetic field being one of direct factors which deteriorate an image in high-resolution image observation in an electron microscope or the like, whereas a conventional method therefor by evaluating and observing a spot of electron beam is insufficient in both sensitivity and accuracy, and cannot perform accurate evaluation of the image observation condition of an image observation optical system based on a measurement result in some cases because measurement is performed in an optical condition different therefrom.;SOLUTION: Interference fringes are generated by use of an electron beam biprism, the interference fringes are observed, for example, in a high-resolution image observation optical system while changing the deflection angle of electron beam by the biprism, and a floating magnetic field which affects imaging is quantitatively evaluated based on a contrast of the interference fringes and the deflection angle of electron beam at that time.;COPYRIGHT: (C)2010,JPO&INPIT
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