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The method of maskless lithography rasterization techniques based on global optimization, a computer readable medium and apparatus

机译:基于全局最优化的无掩模光刻光栅化方法,计算机可读介质和装置

摘要

In litho Gley Fi system configured to print a desired pattern, a method and system for determining the state-space light modulator (SLM) pixels is provided. And determining diffraction orders associated with an ideal mask of a pattern to be printed by the lithography system, then to match the diffraction orders of all relevant imaging, this method constitutes the state of the SLM pixels I and a thing. [Selection Figure Figure 4
机译:在配置成打印期望图案的光刻Gley Fi系统中,提供了一种用于确定状态空间光调制器(SLM)像素的方法和系统。并且确定与要由光刻系统印刷的图案的理想掩模相关的衍射级,然后匹配所有相关成像的衍射级,该方法构成了SLM像素I和物体的状态。 [选择图图4

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