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The method of maskless lithography rasterization techniques based on global optimization, a computer readable medium and apparatus
The method of maskless lithography rasterization techniques based on global optimization, a computer readable medium and apparatus
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机译:基于全局最优化的无掩模光刻光栅化方法,计算机可读介质和装置
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摘要
In litho Gley Fi system configured to print a desired pattern, a method and system for determining the state-space light modulator (SLM) pixels is provided. And determining diffraction orders associated with an ideal mask of a pattern to be printed by the lithography system, then to match the diffraction orders of all relevant imaging, this method constitutes the state of the SLM pixels I and a thing. [Selection Figure Figure 4
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