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METHOD OF MANUFACTURING TUNING FORK TYPE CRYSTAL VIBRATION CHIP, CRYSTAL DEVICE
METHOD OF MANUFACTURING TUNING FORK TYPE CRYSTAL VIBRATION CHIP, CRYSTAL DEVICE
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机译：音叉式晶体振动片，晶体器件的制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a method of manufacturing a tuning fork type crystal vibration chip wherein an angle from the front and rear surfaces of an oscillation arm to the fork or the end face of a groove on the base side is gentle.;SOLUTION: The method of manufacturing a tuning fork type crystal vibration chip (10A) includes a photolithography step for exposing the areas corresponding to the base (11), the oscillation arm (12A), and the groove (13A) by coating an anticorrosion film deposited on a crystal material with resist and then exposing the resist, a first etching step for forming the outline of the tuning fork type crystal vibration chip by etching the anticorrosion film excepting the areas corresponding to the base, the oscillation arm, and the groove, and also etching the crystal material, a removing step for removing the anticorrosion film and the resist remaining on the crystal material, and a second etching step for etching either the first fork (14A) formed between a pair of oscillation arms and the base or the end face of a groove on the base side by immersing the crystal material in the etching agent after the removing step.;COPYRIGHT: (C)2012,JPO&INPIT
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