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ALIGNMENT DEVICE, METHOD FOR RESETTING ORIGIN OF ALIGNMENT DEVICE, AND TURN TABLE, TRANSLATION TABLE, MACHINE AND MACHINE CONTROL SYSTEM EQUIPPED WITH ALIGNMENT DEVICE
ALIGNMENT DEVICE, METHOD FOR RESETTING ORIGIN OF ALIGNMENT DEVICE, AND TURN TABLE, TRANSLATION TABLE, MACHINE AND MACHINE CONTROL SYSTEM EQUIPPED WITH ALIGNMENT DEVICE
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机译：校准装置，重置校准装置的原点的方法，以及配备有校准装置的转台，翻译台，机器和机器控制系统
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摘要
The table precise XY , Y , or rotation of the table by the translational drive that allows you to operate at provides an alignment device . ; object (5) are four driving system for driving the loading table 4, the translational degrees of freedom (11) , the translational driving section 12 , the rotational degree of freedom (13) and having a , and also , the electric motor fixed on the machine (41) (1) and detection device (2) installing the first alignment device and the second alignment device in the first position and a second position retainer fixture using , exactly fixed table 4 by means of a mechanical fixing device 41 , and a detection device based on the position detection device , see reference standard it was possible to position storage unit for storing the zero return of the alignment apparatus by 44 .
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