首页>
外国专利>
Origin return method of alignment apparatus and alignment equipment, turning table with the alignment apparatus, translation table, machinery, and machine control system
Origin return method of alignment apparatus and alignment equipment, turning table with the alignment apparatus, translation table, machinery, and machine control system
展开▼
机译：对准装置和对准装置的原点返回方法，具有对准装置的转台，平移台，机器和机器控制系统
展开▼
页面导航
摘要
著录项
相似文献
摘要
To provide an alignment apparatus of the table rotation by the translational drive to be able to operate XYθ good accuracy, or Yθ, θ in the table. Driving system of four drives (4) a table that was placed object (5) is provided with (12), rotational freedom unit (11), translation driver translational freedom portion (13), In addition, provided with (2) the detection device and the electric motor (1) and Anchoring device (41), the position fixing of the second alignment device and a second positioning device of the first, the position fixing device of the first Using the device, the homing of the alignment apparatus be stored in (44) is fixed accurately (4) table, detector reference standard position storage device detector reference standard position and Anchoring device (41) made possible.
展开▼
