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E-FUSE STRUCTURE OF A SEMICONDUCTOR DEVICE, CAPABLE OF IMPROVING ELECTRO-MIGRATION AND THERMO-MIGRATION EFFECTS
E-FUSE STRUCTURE OF A SEMICONDUCTOR DEVICE, CAPABLE OF IMPROVING ELECTRO-MIGRATION AND THERMO-MIGRATION EFFECTS
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机译:半导体器件的电子熔断器结构,能够改善电迁移和热迁移效应
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摘要
PURPOSE: An e-fuse structure of semiconductor device is provided to reduce the occupying area of a circuit for fuse program or fuse sensing by reducing the voltage or current required for the program of e-fuse due to the enforcement overlapping of the movement effects.;CONSTITUTION: A conductive film(20) is formed on a bottom layer(10). An inter-layer insulating film(50) is formed on the conductive film. A fuse unit includes a depletion area and an accumulative area. The fuse unit connects an anode and a cathode. A first insulating layer(30) is close to the depletion area of the fuse unit.;COPYRIGHT KIPO 2011
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