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E-FUSE STRUCTURE OF A SEMICONDUCTOR DEVICE, CAPABLE OF IMPROVING ELECTRO-MIGRATION AND THERMO-MIGRATION EFFECTS

机译:半导体器件的电子熔断器结构,能够改善电迁移和热迁移效应

摘要

PURPOSE: An e-fuse structure of semiconductor device is provided to reduce the occupying area of a circuit for fuse program or fuse sensing by reducing the voltage or current required for the program of e-fuse due to the enforcement overlapping of the movement effects.;CONSTITUTION: A conductive film(20) is formed on a bottom layer(10). An inter-layer insulating film(50) is formed on the conductive film. A fuse unit includes a depletion area and an accumulative area. The fuse unit connects an anode and a cathode. A first insulating layer(30) is close to the depletion area of the fuse unit.;COPYRIGHT KIPO 2011
机译:目的:提供一种半导体器件的电子熔丝结构,以通过减小由于移动效应的强制重叠导致的电子熔丝程序所需的电压或电流,从而减小用于熔丝编程或熔丝感测的电路的占用面积。 ;组成:在底层(10)上形成导电膜(20)。在导电膜上形成层间绝缘膜(50)。熔断器单元包括耗尽区和累积区。熔断器单元连接阳极和阴极。第一绝缘层(30)靠近保险丝单元的耗尽区域。; COPYRIGHT KIPO 2011

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