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METHOD OF IDENTIFYING A CAUSE OF HAZE GENERATION OF A PHOTOMASK, CAPABLE OF PRECISELY CLASSIFYING CAUSE OF HAZE GENERATION
METHOD OF IDENTIFYING A CAUSE OF HAZE GENERATION OF A PHOTOMASK, CAPABLE OF PRECISELY CLASSIFYING CAUSE OF HAZE GENERATION
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机译：识别光罩产生雾的原因的方法，可以精确地分类产生雾的原因
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摘要
PURPOSE: A method of identifying a cause of haze generation of a photomask is provided to evaluate the haze generation cause source and prevent the haze generation by evaluating the organic material according to the status of haze generation and classifying as the haze generation cause source or the non haze generation source.;CONSTITUTION: The organic materials produced in the photomask manufacture process are extracted(S10). The organic contaminant is attached to the surface of photomask(S20). The accelerated light is irradiated on the organic contaminant on the surface of the photomask(S30). The status of haze generation is inspected by measuring the organic contaminant irradiated by the light(S40).;COPYRIGHT KIPO 2010
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