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COEFFICIENT OF ELASTICITY METHOD OF MEASUREMENT OF A MULTI-LAYERED THIN FILM WHICH MEASURES THE MODULUS OF ELASTICITY
COEFFICIENT OF ELASTICITY METHOD OF MEASUREMENT OF A MULTI-LAYERED THIN FILM WHICH MEASURES THE MODULUS OF ELASTICITY
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机译：量度弹性模量的多层薄膜的弹性系数法
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摘要
PURPOSE: A coefficient of elasticity method of measurement of a multi-layered thin film which measures the modulus of elasticity is provided to measure the apparent modulus of elasticity of the multi-layered thin film using the wrinkle pitch of a single layered thin film layer and multilayer foil film layer.;CONSTITUTION: Compressive stress is added to the multi-layered thin film sample in which a multi-layered thin film(1) is formed on a substrate. Wrinkle is formed on the multi-layered thin film surface of the multi-layered thin film sample. A wrinkle pitch(3) formed on the multi-layered thin film surface, and the through-thickness of the multi-layered thin film and coefficient of elasticity of substrate are measured. The apparent modulus of elasticity of the multi-layered thin film is obtained using a measured value.;COPYRIGHT KIPO 2010
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