Lanthanide series metal implant to control work function of metal gate electrodes

• 1. 金属栅电极等效功函数调节方法 [P] . 中国专利： CN104347411B . 2018.04.13
• 2. 金属栅电极等效功函数调节方法 [P] . 中国专利： CN104347411A . 2015-02-11
• 3. Lanthanide series metal implant to control work function of metal gate electrodes [P] . 美国专利： US2008160736A1 . 2008-07-03

  机译： 镧系金属植入物控制金属栅电极的功函数

• 4. LANTHANIDE SERIES METAL IMPLANT TO CONTROL WORK FUNCTION OF METAL GATE ELECTRODES [P] . 世界知识产权组织专利： WO2008083260A1 . 2008-07-10

  机译： 镧系金属浸渍剂可控制金属门电极的工作功能

• 5. Method of making multiple work function gates by implanting metals with metallic alloying additives [P] . 美国专利： US6770521B2 . 2004-08-03

  机译： 通过用金属合金添加剂注入金属来制造多个功函数门的方法

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