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READOUT-INTERFACE CIRCUIT FOR A CAPACITIVE MICROELECTROMECHANICAL SENSOR, AND CORRESPONDING SENSOR
READOUT-INTERFACE CIRCUIT FOR A CAPACITIVE MICROELECTROMECHANICAL SENSOR, AND CORRESPONDING SENSOR
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机译：电容式微机电传感器的读出接口电路及相应的传感器
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摘要
In a capacitive sensor, a detection structure, of a microelectromechanical type, is provided with a fixed element and a mobile element, capacitively coupled to one another, generating a capacitive variation as a function of a quantity to be detected, and with a parasitic coupling element, capacitively coupled to at least one between the mobile element and the fixed element generating a first parasitic capacitance, intrinsic to the detection structure; a readout-interface circuit is connected to the detection structure and generates, on an output terminal thereof, an output signal as a function of the capacitive variation. The readout-interface circuit has a feedback path between the output terminal and the parasitic coupling element so as to drive the first intrinsic parasitic capacitance with the output signal.
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