首页>
外国专利>
Multilayer optical filter film structure design apparatus and method, and film structure design program
Multilayer optical filter film structure design apparatus and method, and film structure design program
展开▼
机译：多层滤光片膜结构设计装置和方法，以及膜结构设计程序
展开▼
页面导航
摘要
著录项
相似文献
摘要
PPROBLEM TO BE SOLVED: To avoid mismatching of optical admittance and to significantly suppress production of ripples. PSOLUTION: The multilayer film filter 1 has a symmetric structure of a plurality of cavities 4aSB1/SBto 4aSBk/SBand coupling layers 3 arranged along the layer deposition direction. The number of alternated layers of L layers 7aSB1/SBto 7aSBk/SBand H layers 7bSB1/SBto 7bSBk/SBin reflection multilayer films 6aSB1/SBto 6aSBk/SBand 6bSB1/SBto 6bSBk/SBand the layer thickness of spacer layers 3aSB1/SBto 3aSBk/SBin the respective cavities 4aSB1/SBto 4aSBk/SBare designed according to the compared result of a specified refractive index of an optical substrate 2 and the optical admittance in a specified wavelength range for an equivalent film which is calculated from the plurality of cavities 4aSB1/SBto 4aSBk/SBand coupling layers 3 having the symmetric structure in terms of a single equivalent layer. PCOPYRIGHT: (C)2004,JPO
展开▼
机译：
要解决的问题：为避免光学导纳失配并显着抑制纹波的产生。
解决方案：多层膜滤光片1具有多个空腔4a 1 至4a k 的对称结构，以及沿层沉积方向排列的耦合层3。 L层7a 1 至7a k 和H层7b 1 至7b k 的交替层数反射多层膜6a 1 至6a k 和6b 1 至6b k 以及间隔层3a的层厚根据a的比较结果设计各个腔体4a 1 至4a k 中的 1 至3a k 由多个腔体4a 1 至4a k 计算并计算出等效膜的光学基板2的特定折射率和特定波长范围内的光导率就单个等效层而言，层3具有对称结构。
