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CALCULATION METHOD AND CALCULATION APPARATUS FOR CALCULATING NONLINEAR ERROR IN LENGTH MEASUREMENT METER, LENGTH MEASUREMENT METER WITH CALCULATION APPARATUS, EXPOSURE APPARATUS WITH CALCULATION APPARATUS OR LENGTH MEASUREMENT METER, AND ELECTRONIC DEVICE MANUFACTURING METHOD
CALCULATION METHOD AND CALCULATION APPARATUS FOR CALCULATING NONLINEAR ERROR IN LENGTH MEASUREMENT METER, LENGTH MEASUREMENT METER WITH CALCULATION APPARATUS, EXPOSURE APPARATUS WITH CALCULATION APPARATUS OR LENGTH MEASUREMENT METER, AND ELECTRONIC DEVICE MANUFACTURING METHOD
PROBLEM TO BE SOLVED: To provide a calculation method for simply and accurately calculating a nonlinear error in a length measurement meter.;SOLUTION: The calculation method for calculating the nonlinear error in the length measurement meter for measuring a position of a movable object has a calculation process for calculating the nonlinear error in the first or second length measurement meter based on the position of the first movable object for placing a first object disposed on a first surface as a first length measurement value measured by the first length measurement meter, the position of the second movable object for placing a second object disposed on a second surface as a second length measurement value measured by the second length measurement meter, and a detection result of a to-be-tested light detected by a light detection means at the position of the first or second movable object.;COPYRIGHT: (C)2010,JPO&INPIT
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