Fabrication method of doped semiconductor films and nanostrucutres (by aerosol assisted chemical vapor deposition or spray pyrolysis techniques

• 1. 梯度自掺杂多元金属氧化物半导体薄膜的喷雾热解制备方法 [P] . 中国专利： CN109930135A . 2019-06-25
• 2. 钨掺杂的纳米晶二氧化钛半导体薄膜及其制备方法和应用 [P] . 中国专利： CN102157268B . 2012.08.01
• 3. METHOD AND APPARATUS FOR FABRICATION OF THIN FILM SUPERCONDUCTOR BY SPRAY PYROLYSIS CHEMICAL VAPOR DEPOSITION METHOD [P] . 世界知识产权组织专利： WO2008038856A1 . 2008-04-03

  机译： 喷雾热解化学气相沉积法制备薄膜超导体的方法和装置

• 4. METHOD AND APPARATUS FOR FABRICATION OF SUPERCONDUCTOR FILM BY SPRAY PYROLYSIS CHEMICAL VAPOR DEPOSITION METHOD [P] . 韩国专利： KR20070042447A . 2007-04-23

  机译： 喷雾热解化学气相沉积法制备超导体薄膜的方法和装置

• 5. SYSTEM FOR DEPOSITING SLIM FILMS OF METALS, SEMICONDUCTING MATERIALS, DIELECTRIC MATERIALS OR POLYMERS IN THE INNER OR OUTER SURFACE OF A TUBE USING THE AEROSOL ASSISTED CHEMICAL VAPOR DEPOSITION TECHNIQUE. [P] . MX362723B . 2018-11-22

  机译： 用于使用气溶胶辅助化学气相沉积技术在管子内部或外部沉积薄金属膜，半导电材料，介电材料或聚合物的系统。

• 1. Nanomechanical and Electrochemical Properties of Diamond-Like Carbon （DLC） Films Deposited by Plasma Enhanced Chemical Vapor Deposition （PECVD） Technique [J] . 王静, 刘贵昌, 徐军, 等离子体科学和技术：英文版 . 2010,第004期
• 2. Influence of Cadmium Doping on Structural, Optical, electrical and Photocatalytic Properties of TiOz Thin Films Prepared by Spray Pyrolysis Technique [J] . Selma M. H. AI-Jawad 物理科学与应用：英文版 . 2016,第001期
• 3. Fabrication of un-doped and magnesium doped TiO 2 films by aerosol assisted chemical vapor deposition for dye sensitized solar cells [J] . Sehar Shakir, Hafiz M. Abd-ur-Rehman, Kamran Yunus, Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics . 2018,第期
• 4. Deposition of copper-doped iron sulfide (Cu_xFe_(1-x)S) thin films using aerosol-assisted chemical vapor deposition technique [J] . Sujit D. Disale, Shivram S. Garje Applied Organometallic Chemistry . 2010,第10期
• 5. Deposition of copper-doped iron sulfide (CuxFe1−xS) thin films using aerosol-assisted chemical vapor deposition technique [J] . Sujit D. Disale Shivram S. Garje Applied Organometallic Chemistry . 2010,第10期
• 6. Development of Aerosol Assisted Chemical Vapor Deposition for Thin Film Fabrication [C] . Dwindra Wilham Maulana, Dian Marthatika, Camellia Panatarani, Padjadjaran International Physics Symposium . 2016
• 7. Metal-organic and aerosol-assisted chemical vapor deposition. Development and application of dithiocarbamate and phosphinoborate ligand-based precursors for cuprous sulfide, molybdenum disulfide/titanium oxide, and metallic silver thin films [D] . McCain, Matthew Neal 2007
• 8. Tungsten Doped TiO2 with Enhanced Photocatalytic and Optoelectrical Properties via Aerosol Assisted Chemical Vapor Deposition [O] . Sanjayan Sathasivam, Davinder S. Bhachu, Yao Lu, -1
• 9. Low-Cost One-Step Fabrication of Highly Conductive ZnO:Cl Transparent Thin Films with Tunable Photocatalytic Properties via Aerosol-Assisted Chemical Vapor Deposition [O] . Arreerat Jiamprasertboon, Sebastian C. Dixon, Sanjayan Sathasivam, 2019
• 10. CuInS2 Films Deposited by Aerosol-Assisted Chemical Vapor Deposition Using Ternary Single-Source Precursors [R] . Jin, M. , Banger, K. , Harris, J. , 2003

• 1. Fabrication and Characterization of Crack Free Nano Porous Titanium Dioxide Thin Films by Spray Deposition Technique [J] . Manzar Abbas Nazar Abbas Shah Fazali Subhan Muhammad Irfan . 材料科学与工程：中英文版 . 2010,第5期
• 2. Fabrication and characterization of iron and iron carbide thin films by plasma enhanced pulsed chemical vapor deposition [J] . 胡玉莲 ,田旭 ,樊启鹏 . 等离子体科学与技术：英文版 . 2019,第10期
• 3. Fabrication of tungsten films by metallorganic chemical vapor deposition [J] . Yi Li ,Jin-pu Li ,Cheng-chang Jia . 矿物冶金与材料学报 . 2012,第012期
• 4. 超声喷雾热解技术制备ZnO纳米片的研究 [C] . . 第十届中国太阳能光伏会议 . 2008
• 5. 气溶胶喷雾辅助合成复合纳米催化剂及其性能研究 [A] . 阚二姐 . 2015