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Mask for use in exposing system, has light-shielding area comprising photonic crystals with lattice constant, where ratio of lattice constant to wavelength of light is specific value within band gap of photonic crystal
Mask for use in exposing system, has light-shielding area comprising photonic crystals with lattice constant, where ratio of lattice constant to wavelength of light is specific value within band gap of photonic crystal
The mask (2) has a light-shielding area (3) for shielding light e.g. extreme UV light, and a light passing area (6) allowing the light to pass through it. The light-shielding area comprises a set of photonic crystals with a lattice constant, where ratio of the lattice constant to a wavelength of the light is a specific value within a band gap of the photonic crystal. The photonic crystal comprises a set of photonic crystal cells, where each photonic crystal cell has a surface (200) receiving the light, and two dielectrics. An independent claim is also included for a method for designing a mask.
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