CONTROL OF ELECTROMECHANICAL BEHAVIOUR OF STRUCTURES IN DEVICE OF MICRO-ELECTROMECHANICAL SYSTEMS

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  机译： 基于微机电系统的设备结构机电控制

• 4. CONTROLLING ELECTROMECHANICAL BEHAVIOUR OF STRUCTURES WITHIN A MICROELECTROMECHANICAL SYSTEMS DEVICE [P] . IN2009CN01565A . 2009-08-21

  机译： 在微机电系统装置中控制结构的机电行为

• 5. CONTROLLING ELECTROMECHANICAL BEHAVIOUR OF STRUCTURES WITHIN A MICROELECTROMECHANICAL SYSTEMS DEVICE [P] . IL181616D0 . 2007-07-04

  机译： 在微机电系统装置中控制结构的机电行为

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