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STAGE SYSTEM CALIBRATION METHOD CAPABLE OF IMPROVING ACCURACY OF CALIBRATION IN AN ENCODER STAGE POSITION MEASUREMENT, A STAGE SYSTEM, AND A LITHOGRAPHY APPARATUS INCLUDING THE SAME
STAGE SYSTEM CALIBRATION METHOD CAPABLE OF IMPROVING ACCURACY OF CALIBRATION IN AN ENCODER STAGE POSITION MEASUREMENT, A STAGE SYSTEM, AND A LITHOGRAPHY APPARATUS INCLUDING THE SAME
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机译：能够提高编码器级位置测量中的校准精度的级系统校准方法，级系统以及包括该级的光刻技术
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摘要
PURPOSE: A stage system calibration method is provided to accurately perform horizontal calibration by not making a noise and a horizontal scanning effect sensitive.;CONSTITUTION: A stage is moved in order to move sensor heads about an encoder grid or to move an encoder grid about sensor heads. During the moving step, a position of the stage is measured through the encoder grid and the sensor heads. A vertical position data map is determined from sensor head output signals of the sensor heads(SH1,SH2). A horizontal position data map is calculated from the vertical position data map. An encoder position measuring system is calibrated based on the calculated horizontal position data map.;COPYRIGHT KIPO 2010
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