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OPTICS TJNIT FOR LASER MICRO-MACHINING WITH FLUID SUPPORTED PUCK AND MEANS FOR OFF-SETTING THE LASER OPTICS WITH RESPECT TO THE AXIS OF THE PUCK
OPTICS TJNIT FOR LASER MICRO-MACHINING WITH FLUID SUPPORTED PUCK AND MEANS FOR OFF-SETTING THE LASER OPTICS WITH RESPECT TO THE AXIS OF THE PUCK
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机译：光学微加工用流体支撑圆盘进行激光微加工，以及使激光光学装置相对于圆盘轴偏移的装置
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摘要
The present invention relates to a laser optics unit comprising: an optics head (12) with an imaging or focussing lens and lens control means adapted to provide a laser beam (14) giving an image of a mask or a focus (13) of a beam along an axis of the beam (14) at a datum point in the unit; a work station (W) adapted to position a substrate work piece (15) relative to the datum point so as to provide for the positioning of the mask image or beam focus (13) along the axis of the beam (14) perpendicular to the substrate work piece (15) positioned by the work station (W); the work station (W) being further adapted to displace the work piece (15) in a given direction (X, Y) transverse the axis of the beam (14); a puck (11) and means for providing for the puck to be fluid supported over a puck region on a substrate work piece (15) on the work station (W); and means linking the puck (11) to the optics head to enable the puck (15) to displace the optics head (12) relative to the axis direction (X, Y), and off-setting means (D) whereby the puck (11), and so the puck region, at least when the puck (11) is fluid supported, is offset from the axis of the laser beam (14) in a direction perpendicular to the axis of beam (14).
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