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Process for obtaining thin films of barium strontium titanate and the low temperature by sol gel and high sintonabilidade of permittivity dielu00c9ctrica
Process for obtaining thin films of barium strontium titanate and the low temperature by sol gel and high sintonabilidade of permittivity dielu00c9ctrica
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机译：通过溶胶凝胶和介电常数高的sintonabilidade钛酸钡锶锶薄膜的制备方法
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摘要
This invenu00c7u00c3o relates to a new process for obtaining thin films of materials dielu00c9ctricos, piezoelu00c9ctricos and ferroelu00c9ctricos at low temperatures, crystalline, dense and with optimized electrical properties, in particular of barium and strontium titanate, BST, the temperat URAs low 600 u00b0 C.In mixed solutions of sol gel ceru00c2micas perovesquu00cdticas conventional particulate with the same / different composition of solutions and dimensions nanomu00c9tricas.The principle that it is it 's the nucleau00c7u00c3o heterogu00c9nea and reduction of energy requirements for the training of engagement of crystalline phase, reducing the temperature of cristalizau00c7u00c3o films, allowing the compatibilizau00c7u00c3o with technology and low cost silicon substrates (steel Glass, metal - non nobles),Opening range of applications of these films and the possibility of development of new devices. The relevancy of invenu00c7u00c3o is related also with the possibility of application to many other systems of electroceru00c2micos, anticipating enlargement of existing applications and the manufacture of new electronic devices.
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