Tribo-chronoamperometry as a tool for CMP application

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• 2. 搅拌摩擦焊用工具构件和使用该工具构件的搅拌摩擦焊装置以及搅拌摩擦焊方法 [P] . 中国专利： CN113681148A . 2021-11-23
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  机译： 摩擦计时电流法作为CMP应用的工具

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  机译： 适用于铜CMP和低K介电CMP应用的自喷CMP工具设计

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  机译： 用于铜CMP和低k介电CMP等应用的自虹吸CMP工具设计

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