首页> 外国专利> Method for generating multivariate analysis model expression for processing apparatus, method for executing multivariate analysis of processing apparatus, control device of processing apparatus and control system for processing apparatus

Method for generating multivariate analysis model expression for processing apparatus, method for executing multivariate analysis of processing apparatus, control device of processing apparatus and control system for processing apparatus

机译：用于生成处理设备的多元分析模型表达式的方法，用于执行处理设备的多元分析的方法，处理设备的控制装置以及用于处理设备的控制系统

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摘要

According to the present invention, multivariate analysis model expressions are generated for a plasma processing apparatus 100A and a plasma processing apparatus 100B by executing a multivariate analysis of detection data provided by a plurality of sensors included in each plasma processing apparatus when the plasma processing apparatuses 100A and 100B operate based upon first setting data. Then, when the plasma processing apparatus 100A operates based upon new second setting data, detection data provided by the plurality of sensors in the plasma processing apparatus 100A are used to generate a corresponding multivariate analysis model expression, and by using the new multivariate analysis model expression corresponding to the plasma processing apparatus 100A generated based upon the second setting data and to the plasma processing apparatus 100B, a multivariate analysis model expression corresponding to the new second setting data is generated four the plasma processing apparatus 100B.

机译：根据本发明，通过执行对由...提供的检测数据的多元分析，为等离子体处理装置 100 A和等离子体处理装置 100 B生成多元分析模型表达式。当等离子体处理设备 100 A和 100 B基于第一设置数据进行操作时，每个等离子体处理设备中包括多个传感器。然后，当等离子体处理设备 100 A基于新的第二设置数据进行操作时，由等离子体处理设备 100 A中的多个传感器提供的检测数据被用于生成相应的多元分析模型表达式，并使用新的多元分析模型表达式，该表达式对应于根据第二设置数据生成的等离子体处理设备 100 A和等离子体处理设备 100 B> B，在等离子体处理装置 100 B中，生成与新的第二设定数据对应的多元分析模型表达式。 展开▼

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公开/公告号US7505879B2

专利类型

公开/公告日2009-03-17

原文格式PDF

申请/专利权人 MASAYUKI TOMOYASU;HIN OH;HIDEKI TANAKA;
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申请/专利号US20040003829

发明设计人 MASAYUKI TOMOYASU;HIN OH;HIDEKI TANAKA;
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申请日2004-12-06

分类号G06F7/60;

国家 US

入库时间 2022-08-21 19:30:26

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