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Carbon nanotube growth substrate, the carbon nanotube growth method, the grain diameter control method for carbon nanotube growth catalyst, and method of controlling the diameter of carbon nanotubes
Carbon nanotube growth substrate, the carbon nanotube growth method, the grain diameter control method for carbon nanotube growth catalyst, and method of controlling the diameter of carbon nanotubes
Carbon nanotube growth substrate having a catalyst layer is atomized using an arc plasma gun. I grow the CNT by remote plasma CVD method or a thermal CVD method in the catalyst layer. I want to control the particle size of the catalyst for CNT growth in the number of shots of the arc plasma gun. Grown CNT by remote plasma CVD method or a thermal CVD method on the catalyst layer, which is the control of the catalyst particle size, I want to control the outer diameter or inner diameter that.
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