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The uneven beam of pulse laser energy (102) the excimer laser in order
The uneven beam of pulse laser energy (102) the excimer laser in order
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机译：脉冲激光能量的不均匀光束（102）受激准分子激光器依次
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(57) Abstract The laser transmission system and manner incorporate the diffraction Characteristic optical beam integrator. Three-dimensional intensity distribution of the excimer laser beam (10) the diffraction Characteristic optical aperture in order to alter in order to generate the three-dimensional integral beam includes the diffraction Characteristic optical diffuser (12) and the convergent glass lens (22). The diffraction Characteristic optical diffuser (12) strength profile of the excimer laser beam in order with three-dimensional integral plane surface alteration almost for circle substantially in uniform three-dimensional intensity distribution, includes the diffraction grating pattern which is etched in transparent media. The various apertures which are located around three-dimensional integral plane surface make three-dimensional integral distribution the image formation glass lens pass choice. The image formation glass lens forms the image of the beam which is passed around the surface of the system which is excised. The scan element with computer control image formation around the surface scans the beam which is done.
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