首页> 外国专利> Optical assembly, e.g. for use in photolithography, has rotation symmetrical rim for holding optical components, rotation symmetrical rim holder with at least one first and second part; first rim holder part encloses rim circumference

Optical assembly, e.g. for use in photolithography, has rotation symmetrical rim for holding optical components, rotation symmetrical rim holder with at least one first and second part; first rim holder part encloses rim circumference

机译：光学组件用于光刻的，具有用于保持光学部件的旋转对称边缘，具有至少一个第一和第二部分的旋转对称边缘保持器;第一轮辋支架部分围住轮辋圆周

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摘要

The arrangement has a rotation symmetrical rim of essentially circular cross-section for holding optical components (1), a rotation symmetrical holder (3) for accommodating the rim, whereby the rim holder has at least one first and second part and the first rim holder part encloses the rim circumference. The first and second rim holder parts are joined at three or more contact points (4). An independent claim is also included for an optical compone4nt, especially for use in an inventive optical assembly.

机译：该装置具有横截面基本为圆形的用于容纳光学部件（1）的旋转对称轮辋，用于容纳该轮辋的旋转对称支架（3），其中该轮辋支架具有至少一个第一和第二部分以及第一轮辋支架。零件包围轮辋圆周。第一和第二轮辋支架部分在三个或更多个接触点（4）处连接。还包括光学组件的独立权利要求，特别是用于本发明的光学组件中。

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公开/公告号DE102006060088A1

专利类型
公开/公告日2008-06-19

原文格式PDF
申请/专利权人 CARL ZEISS SMS GMBH;
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申请/专利号DE20061060088
发明设计人 SCHAFFER DIRK;HAGE KNUT;
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申请日2006-12-15
分类号G02B7/02;
国家 DE
入库时间 2022-08-21 19:49:32

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