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METHOD OF MEASUREMENT OF MICROMECHANICAL TRANSMITTER SENSOR ELASTIC SUSPENSION RIGIDITY

机译:微机械传感器弹性悬架刚度的测量方法

摘要

FIELD: physics, instruments.;SUBSTANCE: said utility invention relates to instrumentation. Character: a static force within the elastic region is applied to the elastic suspension. The electric capacitance between the sensor and the displacement recording system electrode is measured. After that, electric potential is applied to the electrode, the electric capacitance between the sensor and the displacement recording system electrode is measured again, and the elastic suspension rigidity is calculated using a mathematical ratio.;EFFECT: increase in accuracy and simplification of micromechanical transmitter elastic suspension rigidity monitoring procedure.;1 dwg;.
机译:技术领域:所述实用新型涉及仪器。特征:在弹性区域内的静态力被施加到弹性悬架。测量传感器和位移记录系统电极之间的电容。之后,将电势施加到电极上,再次测量传感器和位移记录系统电极之间的电容,并使用数学比率计算弹性悬架的刚度。效果:提高了精度并简化了微机械变送器弹性悬架刚度监测程序。; 1 dwg;。

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