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OPTOSEMICONDUCTOR DEVICE TEST SYSTEM USING SILICON OPTICAL BENCH AND TESTING METHOD USING THE SAME
OPTOSEMICONDUCTOR DEVICE TEST SYSTEM USING SILICON OPTICAL BENCH AND TESTING METHOD USING THE SAME
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机译：硅光学平台的光电子器件测试系统及其测试方法
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摘要
An optical semiconductor test system using a silicon optical bench and a method for testing using the same are provided to reduce testing time and to improve heat resistance. An optical semiconductor test system comprises an optical semiconductor device tray(10), and an optical semiconductor device tester(20). The optical semiconductor device tray, uses a silicon wafer(11) as a body, has an opening with an inclined surface at a side wall to mount an luminescent semiconductor device(50) on the body, and a vacuum hole(13) applying suction force at a lower part of the opening. The optical semiconductor device tester, self-aligned on the opening of the optical semiconductor device tray to test the optical semiconductor device.
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