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Extraction of tool independent line-edge-roughness (LER) measurements using in-line programmed LER and reliability structures
Extraction of tool independent line-edge-roughness (LER) measurements using in-line programmed LER and reliability structures
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机译：使用在线编程的LER和可靠性结构提取与工具无关的线边缘粗糙度（LER）测量值
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摘要
A system that facilitates extraction of line edge roughness measurements that are independent of proprietorship of a metrology device comprises a structure patterned onto silicon with known line edge roughness values associated therewith. A metrology device obtains line edge roughness measurements from the structure, and a correcting component generates an inverse function based upon a comparison between the known line edge roughness values and the measured line edge roughness values. The metrology device can thereafter measure line edge roughness upon a second structure patterned on the silicon, and the inverse function can be applied to such measured line edge roughness values to enable obtainment of line edge roughness measurements that are independent of proprietorship of the metrology device.
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