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NONLINEAR ELEMENT, METHOD FOR FABRICATING NONLINEAR ELEMENT, AND ELECTRO-OPTIC DEVICE
NONLINEAR ELEMENT, METHOD FOR FABRICATING NONLINEAR ELEMENT, AND ELECTRO-OPTIC DEVICE
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机译：非线性元件，制造非线性元件的方法和光电器件
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摘要
PROBLEM TO BE SOLVED: To provide a nonlinear element in which nitrogen can be distributed suitably over the entire thickness direction of a tantalum oxide film when a tantalum oxide film containing hydrogen and nitrogen is employed as an insulating layer, to provide its fabrication process, and to provide an electro-optic device.;SOLUTION: When a nonlinear element 10x is fabricated, a lower electrode 13x is composed of a tantalum film containing tungsten. With regard to the insulating layer 14x, the upper surface portion of the lower electrode 13x having a significant impact at least on the electrical characteristics is composed of a sputtered film 14y of a tantalum oxide film containing nitrogen, and an anodic oxidation film 14z is formed on the side face of the lower electrode 13x. Subsequently, hydrogen is introduced to the insulating layer 14x and since the surface layer of the sputtered film 14y is containing a large quantity of nitrogen similarly to the deep part thereof, sufficient hydrogen retentivity is ensured.;COPYRIGHT: (C)2008,JPO&INPIT
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