首页> 外国专利> PREPARATION AND PROCEDURE WITH A RESOLUTION-IMPROVED CHARACTERISTICS TO ENSURE AUTHORITY TO TURN THE NECESSARY CHEMICAL MECHANICAL POLICE STRUCTURE INTO FORCE, WHICH IS USED IN A POLICE STRUCK ON A WEAPON

PREPARATION AND PROCEDURE WITH A RESOLUTION-IMPROVED CHARACTERISTICS TO ENSURE AUTHORITY TO TURN THE NECESSARY CHEMICAL MECHANICAL POLICE STRUCTURE INTO FORCE, WHICH IS USED IN A POLICE STRUCK ON A WEAPON

机译：具有改进分辨率的特征的制备和过程，以确保授权将必要的化学机械警察结构转化为强制性武器（用于武器上的警察）

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摘要

CMP methods in which a polishing pad is moved relative to a wafer and a retainer ring implement instructions for applying required pressure to the wafer for CMP operations. Accuracy of computations of the pressures, and of conversion of the pressure to force, is improved without use of high resolution components, such as high resolution digital devices. Such improved accuracy is achieved using both digital and analog operations, and by converting values of required pressure or force from one set of units to a second set of units and then back to the first set of units. A quantization process is performed using data processed by average resolution digital devices. The process transfers both pressure/force scale and pressure/force set point data between separate processors to obtain computed values of pressure and force having acceptable accuracy, such that quantization errors are eliminated or significantly reduced.

机译：CMP方法（其中抛光垫相对于晶圆移动）和固定环实施了有关指令，用于向CMP操作的晶圆施加所需的压力。在不使用诸如高分辨率数字设备的高分辨率组件的情况下，提高了压力的计算精度以及压力至力的转换精度。使用数字和模拟操作，以及通过将所需压力或力的值从一组单元转换成第二组单元，然后再转换回第一组单元，可以实现这种提高的精度。使用平均分辨率数字设备处理的数据执行量化过程。该过程在单独的处理器之间传送压力/力标度和压力/力设定点数据，以获得具有可接受精度的压力和力的计算值，从而消除或显着减少了量化误差。

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公开/公告号DE60221382D1

专利类型
公开/公告日2007-09-06

原文格式PDF
申请/专利权人 LAM RESEARCH CORP.;
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申请/专利号DE20026021382T
发明设计人 SALDANA MIGUEL A.;
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申请日2002-03-27
分类号G05B19/408;B24B37/005;B24B37/30;B24B49/16;G01R31/28;G06F19;H01L21/302;H01L21/304;H01L21/461;H03M1/70;H03M7/24;
国家 DE
入库时间 2022-08-21 20:27:47

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