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Purification of silicon by using electron beam, comprises inserting the silicon into a vacuum chamber, creating a vacuum in the vacuum chamber, and exposing the silicon to an electron beam to form melted silicon
Purification of silicon by using electron beam, comprises inserting the silicon into a vacuum chamber, creating a vacuum in the vacuum chamber, and exposing the silicon to an electron beam to form melted silicon
The purification of silicon by using electron beam, comprises inserting the silicon into a vacuum chamber (1), creating a vacuum in the chamber, exposing the silicon to an electron beam to form melted silicon, evaporating a first group of impurity elements from the melted silicon through exposure to an electron beam, creating another vacuum in the chamber, introducing water into the chamber, reacting the water with a second group of impurity elements in the melted silicon to form an oxide, and evaporating the oxide from the melted silicon through exposure to an electron beam. The purification of silicon by using electron beam, comprises inserting the silicon into a vacuum chamber (1), creating a vacuum in the chamber, exposing the silicon to an electron beam to form melted silicon, evaporating an first group of impurity elements from the melted silicon through exposure to an electron beam, creating another vacuum in the chamber, introducing water into the chamber, reacting the water with a second group of impurity elements in the melted silicon to form an oxide, and evaporating the oxide from the melted silicon through exposure to an electron beam. The first group of impurity elements comprises phosphorus, arsenic and antimony and exhibits a steam pressure in a vacuum, higher than the silicon. The second group of impurity elements comprises boron and carbon and exhibits a steam pressure in a vacuum, equal to or lower than the silicon. The first created vacuum is higher than the second created vacuum. The melted silicon is irradiated to evaporate the elements and the oxide using same electron gun (3), which works with a cold cathode and a glow discharge. The melted silicon is solidified to form a silicon lump to aggregate the metallic elements at an end of the silicon lump, and the end of the silicon lump is cut. An independent claim is included for a device for purifying silicon by using electron beam.
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