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Structural parameter e.g. line width, determining method for use in semiconductor manufacturing, involves analyzing formula for spectrum in partial formula so that partial formulas are newly computed during computation of spectrum
Structural parameter e.g. line width, determining method for use in semiconductor manufacturing, involves analyzing formula for spectrum in partial formula so that partial formulas are newly computed during computation of spectrum
The method involves measuring the spectrum of an object and comparing the measured spectrum with a computed model spectrum. The formula for computing the model spectrum is analyzed in the partial formula such that only partial formulas are newly computed during the computation of further spectrum with the changed model structural parameters. The partial formula has changed model structural parameters.
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