MANUFACTURING METHOD OF LOW-k PLASMA POLYMERIZED THIN FILMS AND LOW-k THIN FILMS MANUFACTURED THEREFROM

• 1. 低折射率膜及其制造方法、防反射膜及其制造方法、低折射率膜用涂敷液套剂、带有微粒层叠薄膜的基材及其制造方法、以及光学部件 [P] . 中国专利： CN102186668B . 2014.07.30
• 2. 低折射率膜及其制造方法、防反射膜及其制造方法、低折射率膜用涂敷液套剂、带有微粒层叠薄膜的基材及其制造方法、以及光学部件 [P] . 中国专利： CN102186668A . 2011-09-14
• 3. MANUFACTURING METHOD OF LOW-K THIN FILMS AND LOW-K THIN FILMS MANUFACTURED THEREFROM [P] . 美国专利： US2009186980A1 . 2009-07-23

  机译： 低k薄膜的制造方法及由其制得的低k薄膜

• 4. MANUFACTURING METHOD OF LOW-K THIN FILMS AND LOW-K THIN FILMS MANUFACTURED THEREFROM [P] . 世界知识产权组织专利： WO2008117905A1 . 2008-10-02

  机译： 低k薄膜的制造方法及由其制得的低k薄膜

• 5. MANUFACTURING METHOD OF LOW-K THIN FILMS AND AFTER ANNEALING PROCESSES USING RTA, LOW-K THIN FILMS MANUFACTURED THEREFROM [P] . 韩国专利： KR100845941B1 . 2008-07-14

  机译： 低介电常数薄膜的制造方法及使用RTA的退火工艺后，由其制得的低介电常数薄膜

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