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Electrostatic actuation method and electrostatic actuator with integral electrodes for microelectromechanical systems
Electrostatic actuation method and electrostatic actuator with integral electrodes for microelectromechanical systems
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机译：用于微机电系统的静电致动方法和带有集成电极的静电致动器
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摘要
An electrostatic actuation method for micro-electromechanical systems, comprising:- providing a first electrode (10) integral to a movable part (100) of the micro-electromechanical system, and- providing at least a second electrode (20, 20') also integral to the same movable part (100) of the micro-electromechanical system, there being a gap (40) between said first and second electrodes, where said first and second electrodes are electrically isolated from each other using an electrically non-conductive material (30),- inducing a charge in the electrodes which generates a force between the electrodes, said force acting between the electrodes causing the deformation of the movable part of the micro-electromechanical system.;The invention also relates to an electrostatic actuator with integral electrodes for micro-electromechanical systems.
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