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The effects of ionizing radiation on microelectromechanical systems (MEMS) actuators: electrostatic, electrothermal, and bimorph

机译：电离辐射对微机电系统（MEMS）致动器的影响：静电，电热和双压电晶片

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摘要

The effects of ionizing radiation on the operation of polysilicon microelectromechanical systems (MEMS) electrostatic, electrothermal, and bimorph actuators were examined. All devices were irradiated up to a total ionizing dose of 1 megarad(Si) using both a low energy X-ray source (LEXR) and Cobalt-60 (Co-60) gamma source. The electrostatic actuators exhibited a decrease in capacitance and thereby an increase in voltage per deflection when subjected to the LEXR radiation environment. Devices irradiated with the Co-60 source showed no changes in the capacitance/voltage relationship after irradiation. The electrothermal actuator operation was not affected by exposure to either type of ionizing radiation. The tip deflection measurements of the bimorph actuators showed a slight decrease between pre- and post characterization.
机译：检查了电离辐射对多晶硅微机电系统（MEMS）静电，电热和双压电晶片执行器的操作的影响。使用低能X射线源（LEXR）和钴60（Co-60）γ源对所有设备进行总离子化剂量达1兆拉德（Si）的辐照。当受到LEXR辐射环境的影响时，静电致动器的电容减小，从而单位偏转电压升高。用Co-60光源辐照的器件在辐照后未显示电容/电压关系的变化。电热致动器的操作不受暴露于任何一种电离辐射的影响。双压电晶片执行器的尖端挠度测量结果表明，在表征前后，其略有降低。

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