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ELECTROSTATIC ACTUATOR FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
ELECTROSTATIC ACTUATOR FOR MICROELECTROMECHANICAL SYSTEMS (MEMS)
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机译：微机电系统（MEMS）的静电执行器
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摘要
Electrostatic actuator for microelectromechanical systems that uses induced charge build-ups as amplifiers of the electrostatic energy present on said devices without such build-ups where the space-charge regions are between, at least, two electrodes (1,6) configured such that said charge regions may be modulated by the voltage applied between said electrodes (1,6); and where it includes a rectifying junction (2) between the metallization of the first electrode (1) and the material of the microdevice (3); and where an ohmic contact (8) on the material of the device and the contact (1) of the metallization, makes it possible to polarize the rectifying junction (2) and modulate its charge region; all such that connecting the ohmic contact (8) to the electrode (6) via the contact (7) causes the electrostatic interaction between the electrode (6) and the charge region of the junction (2).
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