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VERTICALLY-INTEGRATED WAVEGUIDE PHOTODETECTOR APPARATUS AND RELATED COUPLING METHODS

机译:垂直集成的波导光电检测器装置及相关的耦合方法

摘要

High-speed optoelectronic devices having a waveguide (180) densely integrated with and evanescently coupled to a photodetector (140, 190, 170, 195) are fabricated utilizing methods generally compatible with CMOS processing techniques. In various implementations, the waveguide consists essentially of single crystal silicon and the photoprotector contains, or consists essentially of, epitaxially grown germanium or a silicon-germanium alloy having a germanium concentration exceeding about 90% .
机译:利用通常与CMOS处理技术兼容的方法来制造具有与光检测器(140,190、170、195)紧密集成并e逝耦合的波导(180)的高速光电器件。在各种实施方式中,波导基本上由单晶硅组成,并且光保护器包含或基本上由外延生长的锗或锗浓度超过约90%的硅锗合金组成。

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