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Vibrator for a vibrating gyroscope, vibrating gyroscope using the vibrator, and electronic apparatus using the vibrating gyroscope

机译:用于振动陀螺仪的振动器,使用该振动器的振动陀螺仪以及使用该振动陀螺仪的电子设备

摘要

In order to provide a vibrating gyroscope in which variations in the angular-velocity detection sensitivity are not likely to occur even when sharp temperature changes occur, a vibrator (10) for a vibrating gyroscope includes, on one main surface, a first detection electrode (104a) and a second detection electrode (104b), which output a signal containing an angular-velocity signal, wherein a groove (107a) having a predetermined depth is provided between the first detection electrode (104a) and the second detection electrode (104b). As for a vibrator (10) for a vibrating gyroscope of the present invention, since the difference between the resonance frequency and the anti-resonance frequency in a bending vibration mode in the driving direction becomes closer to the difference between the resonance frequency and the anti-resonance frequency in a bending vibration mode in the detection direction, variations in the angular-velocity detection sensitivity are not likely to occur even when sharp temperature changes are given. IMAGE
机译:为了提供一种即使在温度急剧变化的情况下也不会发生角速度检测灵敏度的变化的振动陀螺仪,该振动陀螺仪的振动器(10)在一个主面上具有第一检测电极( 104a)和第二检测电极(104b),其输出包含角速度信号的信号,其中具有预定深度的凹槽(107a)设置在第一检测电极(104a)和第二检测电极(104b)之间。对于本发明的振动陀螺仪用振子(10),由于弯曲振动模式下的共振频率与反共振频率之间的差在驱动方向上变得更接近共振频率与反共振之间的差。在弯曲振动模式下沿检测方向的共振频率,即使给出急剧的温度变化也不大可能发生角速度检测灵敏度的变化。 <图像>

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