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VIBRATOR FOR A VIBRATING GYROSCOPE, VIBRATING GYROSCOPE USING THE VIBRATOR, AND ELECTRONIC APPARATUS USING THE VIBRATING GYROSCOPE
VIBRATOR FOR A VIBRATING GYROSCOPE, VIBRATING GYROSCOPE USING THE VIBRATOR, AND ELECTRONIC APPARATUS USING THE VIBRATING GYROSCOPE
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机译：用于振动陀螺仪的振动器，使用振动器振动陀螺仪，以及使用振动陀螺仪的电子仪器
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摘要
In order to provide a vibrating gyroscope in which variations in the angular-velocity detection sensitivity are not likely to occur even when sharp temperature changes occur, a vibrator (10) for a vibrating gyroscope includes, on one main surface, a first detection electrode (104a) and a second detection electrode (104b), which output a signal containing an angular-velocity signal, wherein a groove (107a) having a predetermined depth is provided between the first detection electrode (104a) and the second detection electrode (104b). As for a vibrator (10) for a vibrating gyroscope of the present invention, since the difference between the resonance frequency and the anti-resonance frequency in a bending vibration mode in the driving direction becomes closer to the difference between the resonance frequency and the anti-resonance frequency in a bending vibration mode in the detection direction, variations in the angular-velocity detection sensitivity are not likely to occur even when sharp temperature changes are given. IMAGE
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