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Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

机译：多功能硬X射线纳米探针仪器的光机械结构

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A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.
机译：一种用于表征纳米级材料和装置的多功能硬X射线纳米探针仪器，包括具有全场透射模式的扫描探针模式。扫描探针模式提供荧光光谱和衍射对比成像。全场传输模式允许进行二维（2-D）成像和层析成像。纳米探针仪器包括用于聚焦和成像的波带片光学器件。纳米探针仪器包括一个用于定位波带片光学元件的平台组。纳米探针仪器包括用于放置样品的样品台组。增强型激光多普勒位移计（LDDM）系统可在波带片光学系统和样品架之间的纳米分辨率范围内提供二维差分位移测量。数字信号处理器（DSP）实现了实时闭环反馈技术，可在区域板光学器件和样品架之间提供差分振动控制。

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