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ZERO-ALIGNMENT METHOD FOR TUNABLE FABRICATION OF THREE-DIMENSIONAL PHOTONIC CRYSTALS BY MULTIPLE-EXPOSURE LASER INTERFERENCE USING DIFFRACTION GRATINGS PATTERNED ON A SINGLE MASK
ZERO-ALIGNMENT METHOD FOR TUNABLE FABRICATION OF THREE-DIMENSIONAL PHOTONIC CRYSTALS BY MULTIPLE-EXPOSURE LASER INTERFERENCE USING DIFFRACTION GRATINGS PATTERNED ON A SINGLE MASK
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机译:单一掩模上的衍射光栅通过多次曝光激光干涉对三维光子晶体进行可调谐制造的零对准方法
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摘要
A method for fabricating three-dimensional photonic crystal structures includes providing a layer of photosensitive material; introducing a laser beams into the material; reintroducing the laser beams into the photosensitive material during a second exposure; combining results from at least the first and second exposures to produce a three-dimensionally periodic pattern in the photosensitive material. A related system includes a laser source; a grating array having a plurality of diffraction gratings located thereon; a mask plate located on a photoresist layer and arranged in registration with the grating array; a rotating shutter arranged between the grating array and the laser source, said rotating shutter being suitable for periodically blocking light from the laser source; wherein each of the diffraction gratings is positioned and oriented so as to converge all first-order diffracted spots to a common point lying in a plane of a back side of the mask plate.
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