首页> 外国专利> Catadioptric projection objective lens present application, the United States Provisional Patent Application No. 60/587 filed United States Provisional Patent Application No. 60 / 536,248 filed on January 14, 2004, to July 14, 2004, 2004 9 and the United States Provisional Patent Application No. 60 / 591,775 issue that has been filed United States Provisional Patent Application No. 60 / 617,674 filed on October 13, 504 issue, 2004, to July 27, 2004 I claims the benefit of priority of U.S. Provisional Application No. 60 / 612,823 filed on the 24th month. The disclosure of the United States Provisional Patent Application All of these constitute a part of the description of the present application.

Catadioptric projection objective lens present application, the United States Provisional Patent Application No. 60/587 filed United States Provisional Patent Application No. 60 / 536,248 filed on January 14, 2004, to July 14, 2004, 2004 9 and the United States Provisional Patent Application No. 60 / 591,775 issue that has been filed United States Provisional Patent Application No. 60 / 617,674 filed on October 13, 504 issue, 2004, to July 27, 2004 I claims the benefit of priority of U.S. Provisional Application No. 60 / 612,823 filed on the 24th month. The disclosure of the United States Provisional Patent Application All of these constitute a part of the description of the present application.

机译：折反射投影物镜本申请，2004年1月14日至2004年7月14日提交的美国临时专利申请第60/587号和2004年7月14日提交的美国临时专利申请第60 / 536,248号以及美国临时专利。 2004年10月13日504号美国临时专利申请（2004年7月27日提交）的第60 / 591,775号美国临时专利申请我要求美国60 //临时专利申请的优先权第24个月提交了612,823。美国临时专利申请的公开所有这些构成了本申请的描述的一部分。

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Catadioptric projection are suitable for use in (VUV) range vacuum ultraviolet having a potential image-side numerical aperture very high and can reach a value that allows immersion lithography at numerical aperture SOLVED] NA 1 I will provide an objective lens. A catadioptric projection objective for imaging the image plane of the projection objective lens pattern formed on the object plane of SOLUTION projection objective lens, the first pattern provided in the object plane The second objective part for imaging the second intermediate image first objective part for imaging the intermediate image, the first intermediate image, and the third objective part for imaging the image plane of the second intermediate image, a first concave mirror and a having a first continuous mirror surface and a second concave one, is located upstream of the second intermediate image having at least a second continuous mirror surface, pupil plane, the first and intermediate object plane between the image, between the second intermediate image and the first, and is formed between the image plane and the second intermediate image, a concave mirror and all are spaced apart optically from the pupil plane, the catadioptric projection the objective lens. [Selection] Figure Figure 1

机译：折反射投影适用于（VUV）范围的真空紫外线，其潜在像侧数值孔径非常高，并且可以达到允许在数值孔径下进行浸没式光刻的值。NA> 1 I将提供一个物镜。折反射式投影物镜，用于对在SOLUTION投影物镜的物平面上形成的投影物镜图案的像面进行成像，将第一图案设置在物平面中。第二物镜部对第二中间图像进行成像，第一物镜部对第二中间图像进行成像。中间图像，第一中间图像和用于成像第二中间图像的图像平面的第三物镜部分，第一凹面镜以及具有第一连续镜面和第二凹面的凹面位于第二中间图像的上游具有至少第二连续镜面，光瞳面，在图像之间，在第二中间图像和第一中间图像之间的第一和中间物平面，并且在图像平面和第二中间图像之间形成，凹面镜和所有与瞳孔平面光学隔开，折反射投影物镜。 [选择]图图1

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公开/公告号JP2007518125A

专利类型
公开/公告日2007-07-05

原文格式PDF
申请/专利权人カール・ツァイス・エスエムティー・アーゲー;
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申请/专利号JP20060548262
发明设计人デイヴィッドシェイファー;ヴィルヘルムウルリッヒ;アウレリアンドドック;ルドルフフォン・ビュナウ;ハンス・ユルゲンマン;アレキサンダーエップル;
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申请日2005-01-13
分类号G02B17/08;G02B13/18;G02B13/24;H01L21/027;
国家 JP
入库时间 2022-08-21 21:10:35

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