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METHOD FOR DRIVING MICRO-ELECTRO MECHANICAL ELEMENT, METHOD FOR DRIVING MICRO-ELECTRO MECHANICAL ELEMENT ARRAY, MICRO-ELECTRO MECHANICAL ELEMENT, MICRO-ELECTRO MECHANICAL ELEMENT ARRAY, AND IMAGE FORMING APPARATUS
METHOD FOR DRIVING MICRO-ELECTRO MECHANICAL ELEMENT, METHOD FOR DRIVING MICRO-ELECTRO MECHANICAL ELEMENT ARRAY, MICRO-ELECTRO MECHANICAL ELEMENT, MICRO-ELECTRO MECHANICAL ELEMENT ARRAY, AND IMAGE FORMING APPARATUS
PROBLEM TO BE SOLVED: To provide a method for driving a micro-electro mechanical element capable of actively reducing vibration in a movable part and to achieve fast switching operation.;SOLUTION: A micro-electro mechanical element 100 that has a movable part 27 supported to be capable of elastically displacing and suppresses vibration generating when the movable part 27 is displaced by a physical action is driven in the following manner. When the movable part 27 is driven toward one or more normal points which are displacement end positions of the movable part 27 by the physical action force by at least one or more driving components 35a, 35b that impart physical action force to the movable part 27, a first physical action force is continuously and constantly imparted to the movable part 27 in a first period from when the movable part 27 starts to displace until it reaches the normal point so as to render the velocity of the movable part into almost zero when the movable part reaches the normal point; and a second physical action force is imparted to the movable part 27 in a second period after the movable part 27 reaches the normal point so as to position the movable part 27 at the normal point.;COPYRIGHT: (C)2007,JPO&INPIT
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